Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
From a variational formulation, equations of motion and constitutive relations are derived for an extensible elastica executing a plane motion. The conditions which cause the separation of the action density into kinetic and potential energies are investigated, and some problems are solved. © 1966.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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