Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The anisotropic vortex transport properties of c-axis-oriented Nd1.85Ce0.15CuO4-x superconducting epitaxial films are found consistent with a dislocation-mediated second-order vortex-solid melting transition. The anisotropic critical exponents and the electronic mass ratio are determined from the scaling of the current-voltage characteristics. The nucleation energy of vortex dislocations due to both thermal and disorder fluctuations and its relation to the vortex elastic moduli is inferred from our experiments. © 1992 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Michiel Sprik
Journal of Physics Condensed Matter
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry