Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999