R.M. Shelby, J. Hoffnagle, et al.
Optics Letters
Conference paper
TIME RESOLVED CALORIMETRY OF 30 nm Te-FILMS DURING LASER ANNEALING.
Abstract
The temperature of 30 nm thick Te films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystallization were observed. Boiling was identified as the prevalent mechanism for the loss of material.
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