Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We study spaces generated by translations of a fixed function over lattice points. We provide some new algebraic and approximation properties for these spaces which show their applicability for finite element analysis. © 1983.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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