PaperMichael Hatzakis, semiconductor industry pioneerJ. Paraszczak, J.M. Shaw, et al.Micro and Nano Engineering
PaperLight-coupling masks: An alternative, lensless approach to high-resolution optical contact lithographyHeinz Schmid, Hans Biebuyck, et al.Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperNEW RELIABLE STRUCTURE FOR HIGH TEMPERATURE MEASUREMENT OF SILICON WAFERS USING A SPECIALLY ATTACHED THERMOCOUPLE.S. Cohen, T.O. Sedgwick, et al.MRS Proceedings 1983
PaperHarmonic analysis in rheological property measurementThomas E. Karis, C. Mark Seymour, et al.Rheologica Acta
