Velocity Dependence of the Ionization Probability of Sputtered Atoms

Abstract

The velocity dependence of the ionization probability of sputtered O- from chemisorbed oxygen layers on V and Nb is studied. The ionization probability is found to depend on the normal component of the emission velocity, which suggests that the ionization process is an ion-surface interaction and not an ion-atom binary interaction. For v>1×106 cm/sec, the ionization probability shows an exponential dependence on v. However, this velocity dependence fails at lower velocities. ©1981 The American Physical Society.