Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
During the past decade, wavelets have come to be recognized as a branch of mathematical analysis. As the field had matured, a variety of pragmatic applications have been developed. Quantitative evidence of the impact of wavelets on industry is the increase in wavelet-related patents which have been filed in the United States, Japan and Europe in the past two decades. We note some trends in patent filings and examine technical aspects of some noteworthy examples. In addition to patented applications, academic studies use wavelets to analyze data, signals and mathematical models. We review the technologies used in these applications and examine how this analysis has been gainfully employed in the development of system prototypes and commercial products as well as industrial design and manufacturing processes.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Jianke Yang, Robin Walters, et al.
ICML 2023
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991