Abstract
The performance at soft x-ray wavelengths of multilayer mirrors fabricated with absorber layers of transition metals in the Ni to V series has been tested. Tests were performed at the Stanford Synchroton Radiation Laboratory, using a test chamber which allowed reflectivity measurements to be performed at angles from near-grazing to near-normal incidence. Useful reflectivity data were obtained at energies from 80 eV to the carbon edge (˜250 eV). Some of the materials which were found to perform well at coarse 2d spacings were later tested in finer multilayers to evaluate the influence of interlayer surface roughness on reflectivity. © 1984 Optical Society of America.