A Systematic Study on BEOL Defectivity Control for Future AI Application
- James H.-C. Chen
- Fee Li Lie
- et al.
- 2020
- ASMC 2020
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Process Co-Optimization of CVD and CMP for Tungsten Metallization
- Shanti Pancharatnam
- Wei Tsu Tseng
- et al.
- 2020
- ECS J. Solid State Sci. Technol.