Topology of Silicon Structures with Recessed SiO2
- E. Bassous
- H.N. Yu
- et al.
- 2019
- JES
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3 results for V. Maniscalco
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
Refractory metal silicide formation induced by As+ implantation
- M.Y. Tsai
- C.S. Petersson
- et al.
- 2008
- Applied Physics Letters