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D.Y. Yoon- D.Y. Yoon
- G.D. Smith
- et al.
- 1995
- SPE ANTEC 1995
- Hirotsugu Kikuchi
- J.A. Logan
- et al.
- 1995
- SPE ANTEC 1995
- Hiroshi Ito
- William P. England
- et al.
- 1993
- Microlithography 1993
- J.D. Swalen
- G.C. Bjorklund
- et al.
- 1990
- Optical and Optoelectronic Applied Science and Engineering 1990
- J. Twieg
- C. Grant Willson
- et al.
- 1989
- Proceedings of SPIE 1989
- Bernd Reck
- Manfred Eich
- et al.
- 1989
- SPIE Annual Technical Symposium 1989
- Manfred Eich
- B. Reck
- et al.
- 1989
- QELS 1989
- D.Y. Yoon
- Sanat K. Kumar
- et al.
- 1988
- ACS PMSE 1988
- 1989
- ACS Division of Polymer Chemistry Miami Beach Meeting 1989