Practical dc squids with extremely low 1/f noiseC.D. TescheK.H. Brownet al.1985IEEE Transactions on Magnetics
Reactive etching mechanism of tungsten silicide in CF4-O2 plasmaYoung H. LeeMao-Min Chenet al.1984Thin Solid Films
Silicon etching mechanism and anisotropy in CF4+O2 plasmaYoung H. LeeMao-Min Chen1983Journal of Applied Physics