Electron-beam microcolumns for lithography and related applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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66 results for Ming L. Yu
Experimental evaluation of a 20×20 mm footprint microcolumn
- E. Kratschmer
- H.S. Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Surface chemistry on semiconductors studied by molecular-beam reactive scattering
- Ming L. Yu
- Lisa A. DeLouise
- 1994
- Surface Science Reports
Mechanisms of atomic layer epitaxy of GaAs
- Ming L. Yu
- 1993
- Journal of Applied Physics
A model for the atomic layer epitaxy of GaAs
- Ming L. Yu
- 1993
- Thin Solid Films
β-Hydride elimination reaction of triethylgallium on GaAs(100) surfaces
- Nicholas I. Buchan
- Ming L. Yu
- 1993
- Surface Science
Precursor mediated adsorption of organometallic molecules on GaAs
- Ryutaro Souda
- Ming L. Yu
- 1993
- Surface Science
Non-self-limiting nature of silicon reduction of WF6 in cold wall systems
- R.V. Joshi
- V. Prasad
- et al.
- 1992
- Journal of Applied Physics
The adsorption and decomposition of organometallics on GaAs(001) surfaces studied with high-resolution electron energy-loss spectroscopy
- A. Närmann
- M.L. Yu
- 1992
- Surface Science
Pyrolysis of trimethylgallium on GaAs(100) surfaces
- Ulrich Memmert
- Ming L. Yu
- 1990
- Applied Physics Letters