Comparison of annealing and ion implantation effects during solid state disilicide formation
- F.M. D'Heurle
- M.Y. Tsai
- et al.
- 1982
- Journal of Applied Physics
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24 results for C.S. Petersson
Diffusion marker experiments with rare-earth silicides and germanides: Relative mobilities of the two atom species
- J.E.E. Baglin
- F.M. D'Heurle
- et al.
- 1981
- Journal of Applied Physics
Properties of tungsten silicide film on polycrystalline silicon
- M.Y. Tsai
- F.M. D'Heurle
- et al.
- 1981
- Journal of Applied Physics
Tantalum silicide films deposited by dc sputtering
- J. Angilello
- J.E.E. Baglin
- et al.
- 1981
- Journal of Electronic Materials