Airborne Contamination of a Chemically Amplified Resist. 1. Identification of Problem
- Scott A. MacDonald
- William D. Hinsberg
- et al.
- 1993
- Chemistry of Materials
Publications
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58 results for Scott A. MacDonald
Vanishing interfacial tension in an immiscible polymer blend
- Kenneth R. Shull
- Andrew J. Kellock
- et al.
- 1992
- The Journal of Chemical Physics
Characterization of a Photoresist with Wavelength Selected Tone
- Lester A. Pederson
- Andrew R. Neureuther
- et al.
- 1990
- IEEE T-ED
Acid photogeneration from sulfonium salts in solid polymer matrices
- Dennis R. McKean
- Ulrich Schaedeli
- et al.
- 1989
- Journal of Polymer Science Part A: Polymer Chemistry
Poly(alkylnylstannanes) - A new class of main chain organotin polymers
- Jeff W. Labadie
- Scott A. MacDonald
- et al.
- 1986
- Polymer Bulletin
ORGANOTIN POLYMERS: SYNTHESIS AND RESIST PROPERTIES.
- Jeff W. Labadie
- Scott A. MacDonald
- et al.
- 1986
- Journal of imaging science
Resist materials
- Scott A. MacDonald
- Jean M.J. Frechet
- et al.
- 1985
- Microelectronic Engineering
Advances in the design of organic resist materials
- Scott A. MacDonald
- Hiroshi Ito
- et al.
- 1983
- Microelectronic Engineering