Future of plasma etching for microelectronics: Challenges and opportunities
- Gottlieb S. Oehrlein
- Stephan M. Brandstadter
- et al.
- 2024
- Journal of Vacuum Science and Technology B
Publications
3 results for M. Hori
Low-temperature redistribution of As in Si during Ni silicide formation
- I. Ohdomari
- M. Akiyama
- et al.
- 1984
- Journal of Applied Physics
Reduction of contact resistivity by As redistribution during Pd 2Si formation
- I. Ohdomari
- M. Hori
- et al.
- 1983
- Journal of Applied Physics