Poly(methyl α‐trifluoromethylacrylate) as a positive electron beam resist
- C. Grant Willson
- Hiroshi Ito
- et al.
- 2004
- Polymer Engineering & Science
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Poly[p-(formyloxy)styrene]: Synthesis and Radiation-Induced Decarbonylation
- Jean M.J. Frechet
- Theodore G. Tessier
- et al.
- 2002
- Macromolecules