Surface hardness enhancement in ion-implanted amorphous carbon
- D.H. Lee
- B. Park
- et al.
- 1996
- Journal of Applied Physics
Publications
3 results for D.B. Poker
Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system
- S.M. Gorbatkin
- D.B. Poker
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ion-beam mixing in silicon and germanium at low temperatures
- G.J. Clark
- A.D. Marwick
- et al.
- 1983
- Nuclear Instruments and Methods In Physics Research