Publications

2 results for April M. Schweighart

A Fully Scaled Submicrometer NMOS Technology Using Direct-Write E-Beam Lithography
- - Matthew R. Wordeman
  - April M. Schweighart
  - et al.
- 1985
- IEEE T-ED
FULLY SEALED HALF-MICROMETER NMOS TECHNOLOGY USING DIRECT-WIRE E-BEAM LITHOGRAPHY.
- - M.R. Wordeman
  - A.M. Schweighart
  - et al.
- 1983
- VLSI Technology 1983