Thermal oxidation of silicides on silicon
- F.M. D’Heurle
- A. Cros
- et al.
- 2007
- Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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4 results for R.D. Frampton
A study of the oxidation of selected metal silicides
- R.D. Frampton
- E.A. Irene
- et al.
- 1987
- Journal of Applied Physics
The measurement of effective complex refractive indices for selected metal silicides
- R.D. Frampton
- E.A. Irene
- et al.
- 1986
- Journal of Applied Physics
Rate of formation of silicon dioxide; Semiconducting ruthenium silicide
- F.M. D'Heurle
- R.D. Frampton
- et al.
- 1985
- Applied Physics Letters