Publications

2 results for Paul E. Sackles

In Situ Arsenic-Doped Polysilicon for VLSI Applications
- - Maurizio Arienzo
  - Andrew C. Megdanis
  - et al.
- 1986
- IEEE T-ED
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
- - M. Arienzo
  - A.C. Megdanis
  - et al.
- 1984
- IEDM 1984