In-situ Particulate Contamination Studies In Process Plasmas
- Gary S. Selwyn
- John S. McKillop
- et al.
- 1989
- Microelectronic Integrated Processing 1989
Publications
6 results for John S. McKillop
Doppler profile measurement of Ar and Ar+ translational energies in a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Applied Physics Letters
Quantum yield studies of disilane photodissociation at 193 nm by infrared diode laser spectroscopy
- J.O. Chu
- M.H. Begemann
- et al.
- 1989
- Chemical Physics Letters
Optical emission characterization of a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Hyperfine structure of the BaI X 2∑+ and C 2Π states
- W.E. Ernst
- J. Kandier
- et al.
- 1986
- The Journal of Chemical Physics
Information on the impact parameter dependence of the Ba + HI → Bal(ν = 8) + H reaction
- Chifuru Noda
- John S. McKillop
- et al.
- 1986
- The Journal of Chemical Physics