Field-assisted bonding below 200°C using metal and glass thin-film interlayers
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Applied Physics Letters
Publications
Date
Featured collections
Popular topics
2 results for D. Chapman
Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films