Electron-beam microcolumns for lithography and related applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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49 results for S. Rishton
Experimental evaluation of a 20×20 mm footprint microcolumn
- E. Kratschmer
- H.S. Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
CMOS scaling into the 21st century: 0.1 μm and beyond
- Y. Taur
- Y. Mii
- et al.
- 1995
- IBM J. Res. Dev
Fabrication of three-terminal resonant tunneling devices in silicon-based material
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1994
- Applied Physics Letters
Electron transport in InGaAs/AlInAs heterostructures and its impact on transistor performance
- John K. Zahurak
- Agis A. Iliadis
- et al.
- 1994
- Journal of Applied Physics
Spectroscopy, electron-electron interaction, and level statistics in a disordered quantum dot
- U. Sivan
- F.P. Milliken
- et al.
- 1994
- EPL
Microstructural changes in confined submicrometer aluminum films
- M.L. Chou
- S. Rishton
- et al.
- 1993
- Journal of Applied Physics
Magnification of mask fabricated fibre Bragg gratings
- J.D. Prohaska
- E. Snitzer
- et al.
- 1993
- Electronics Letters
Nanofabrication for quantum devices
- D. Kern
- K.Y. Lee
- et al.
- 1992
- Japanese Journal of Applied Physics