Adjusting the skeleton and pore structure of porous SiCOH dielectrics
- S. Gates
- G. Dubois
- et al.
- 2009
- JES
Publications
4 results for D.W. Gidley
Effects of pore morphology on the diffusive properties of a porous low- κ dielectric
- E. Joseph
- S.P. Sant
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Determination of pore-size distribution in low-dielectric thin films
- D.W. Gidley
- W.E. Frieze
- et al.
- 2000
- Applied Physics Letters
Observation of elastic scattering of positrons and electrons at glancing incidence
- R. Mayer
- C.S. Zhang
- et al.
- 1987
- Physical Review B