Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for R. Pinto

Reactive Ion Etching in SF₆ Gas Mixtures
- - R. Pinto
  - R.S. Babu
- 2019
- JES
Microstructural stability of epitaxial CoSi₂/Si (001) interfaces
- - K. Rajan
  - L.M. Hsiung
  - et al.
- 1991
- Journal of Applied Physics
Improved ion source for use with oxygen
- - C. Richard Guarnieri
  - K.V. Ramanathan
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films