Reactive Ion Etching in SF6 Gas Mixtures
- R. Pinto
- R.S. Babu
- 2019
- JES
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Microstructural stability of epitaxial CoSi2/Si (001) interfaces
- K. Rajan
- L.M. Hsiung
- et al.
- 1991
- Journal of Applied Physics
Improved ion source for use with oxygen
- C. Richard Guarnieri
- K.V. Ramanathan
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films