Epitaxial planarization of patterned yttria-stabilized zirconia substrates for multilayer structures
- Bertha P. Chang
- Neville Sonnenberg
- et al.
- 1994
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.