A simple metal pn polymer process using pulsed electron beams in soft vacuum
- J. Krishnaswamy
- Mark Eyolfson
- et al.
- 1989
- Proceedings of SPIE 1989
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4 results for L. Li
Direct patterning of polyimide by pulsed electron beams in soft vacuum
- Jayaram Krisinaswamy
- Lumin Li
- et al.
- 1989
- Proceedings of SPIE 1989
Soft vacuum, pulsed electron-beam hardening of lithographic polymers
- J. Krishnaswamy
- L. Li
- et al.
- 2011
- Journal of Materials Research
Lithographic Processing of Polymers Using Plasma-Generated Electron Beams
- Lumin Li
- Jayaram Krishnaswamy
- et al.
- 1990
- IEEE Transactions on Plasma Science