Transient diffusion of boron implanted in SI along random and channeling directions
- W.K. Chu
- M. Numan
- et al.
- 1989
- Nuclear Inst. and Methods in Physics Research, B
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Anomalous diffusion of boron implanted into silicon along the [100] direction
- Alwin E. Michel
- M. Numan
- et al.
- 1988
- Applied Physics Letters