Photochemical free‐volume generation in poly(methyl methacrylate) photoresists
- William Limm
- Mitchell A. Winnik
- et al.
- 2004
- Polymer Engineering & Science
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Solvent penetration and photoresist dissolution: A fluorescence quenching and interferometry study
- William Limm
- Deirdre Stanton
- et al.
- 2003
- Journal of Applied Polymer Science