Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
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3 results for S.-E. Hörnström
Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- S.-E. Hörnström
- T. Lin
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal induced crystallization of amorphous silicon
- P.A. Psaras
- L. Hultman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films