Film crystallographic texture and substrate surface roughness in layered aluminum metallization
- K.P. Rodbell
- V. Svilan
- et al.
- 1996
- MRS Spring Meeting 1996
Publications
Date
Featured collections
Popular topics
5 results for T.J. Licata
Suppression of ferroelectric polarization by an adjustable depolarization field
- C.T. Black
- Curtis Farrell
- et al.
- 1997
- Applied Physics Letters
Advanced metallization technology for 256M DRAM
- P. Kücher
- H. Aochi
- et al.
- 1995
- Applied Surface Science
Recent advances in the application of collimated sputtering
- B. Vollmer
- T.J. Licata
- et al.
- 1994
- Thin Solid Films
High Tc superconducting thin films by rapid thermal annealing of Cu/BaO/Y2O3 layered structures
- Q.Y. Ma
- T.J. Licata
- et al.
- 1988
- Applied Physics Letters