Silicon dopant imaging by dissipation force microscopy
- T.D. Stowe
- T.W. Kenny
- et al.
- 1999
- Applied Physics Letters
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3 results for D.J. Thomson
Silicon Dioxide Films Fabricated by Electron Cyclotron Resonant Microwave Plasmas
- T.T. Chau
- T.V. Herak
- et al.
- 1990
- IEEE Transactions on Electrical Insulation
Low-temperature deposition of silicon dioxide films from electron cyclotron resonant microwave plasmas
- T.V. Herak
- T.T. Chau
- et al.
- 1989
- Journal of Applied Physics