Publications

2 results for S.R. Mejia

Silicon Dioxide Films Fabricated by Electron Cyclotron Resonant Microwave Plasmas
- - T.T. Chau
  - T.V. Herak
  - et al.
- 1990
- IEEE Transactions on Electrical Insulation
Low-temperature deposition of silicon dioxide films from electron cyclotron resonant microwave plasmas
- - T.V. Herak
  - T.T. Chau
  - et al.
- 1989
- Journal of Applied Physics