Silicon Dioxide Films Fabricated by Electron Cyclotron Resonant Microwave Plasmas
- T.T. Chau
- T.V. Herak
- et al.
- 1990
- IEEE Transactions on Electrical Insulation
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Low-temperature deposition of silicon dioxide films from electron cyclotron resonant microwave plasmas
- T.V. Herak
- T.T. Chau
- et al.
- 1989
- Journal of Applied Physics