Effects of underlayer on performance of bilayer resists for 248-nm lithography
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
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109 results for Marie Angelopoulos
Hydroxyethyl substituted polyanilines: Chemistry and applications as resists
- Maggie A.Z. Hupcey
- Marie Angelopoulos
- et al.
- 1998
- SPE ANTEC 1998
Highly soluble, imageable polyanilines and applications in electronics
- Marie Angelopoulos
- Alan Lien
- et al.
- 1998
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Etch selectivity of 4SiMA: Hydroxystyrene based copolymers. silicon chemistry for bilayer resist systems
- G.M. Wallraff
- Carl E. Larson
- et al.
- 1998
- J. Photopolym. Sci. Tech.
Chemically amplified resist processing with top coats for deep-ultraviolet and e-beam applications
- Karen Petrillo
- James Bucchignano
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Concentration dependence of aggregation of polyaniline in NMP solution and properties of resulting cast films
- Weigong Zheng
- Marie Angelopoulos
- et al.
- 1997
- Macromolecules
Conducting polyaniline as a potential ITO replacement for flat panel applications
- Alan Lien
- Marie Angelopoulos
- et al.
- 1997
- EURODISPLAY 1997
Conducting polyanilines: properties and applications in microelectronics
- Marie Angelopoulos
- 1997
- Conference on Plastics for Portable and Wireless Electronics 1997
Materials and modeling for organic light-emitting diodes
- J. Campbell Scott
- Sue A. Carter
- et al.
- 1997
- SPIE Photonics West 1997
Conducting polyaniline coatings for submicron lithography and SEM metrology
- Teresita Graham
- Marie Angelopoulos
- et al.
- 1997
- Microlithography 1997