Characterization and simulation of acid catalyzed DUV positive photoresist
- Nicholas K. Eib
- Eytan Barouch
- et al.
- 1993
- Microlithography 1993
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The perfect club benchmarks: Effective performance evaluation of supercomputers
- M. Berry
- D. Chen
- et al.
- 2016
- International Journal of High Performance Computing Applications