Publications

3 results for Mei-Chen Chuang

H atom reactions with GaAs 〈001〉
- - Mei-Chen Chuang
  - J.W. Coburn
- 1990
- Journal of Applied Physics
Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- - J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
On the saturation effect in the picosecond near ultraviolet laser ablation of polyimide
- - Mei-Chen Chuang
  - Andrew C. Tam
- 1989
- Journal of Applied Physics