Electron beam pattern writer for x-ray masks
- R. Viswanathan
- A.D. Wilson
- et al.
- 1989
- Proceedings of SPIE 1989
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Fully scaled 0.5μm MOS circuits by synchrotron radiation X-ray lithography: Mask fabrication and chraterization
- R. Viswanathan
- R.E. Acosta
- et al.
- 1989
- Microelectronic Engineering