Ridge Formation for AlGaAs GRINSCH Lasers by Cl2 Reactive Ion Etching
- M. Jost
- G.L. Bona
- et al.
- 1990
- IEEE Photonics Technology Letters
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Dry ridge etching of AlGaAs GRINSCH lasers
- M. Jost
- P. Buchmann
- et al.
- 1990
- Microelectronic Engineering