Publications

3 results for O. Bula

Aids for driving lithography hard: Wafer level process control features
- - Emily Fisch
  - Reginald Bowley
  - et al.
- 2001
- Microlithography 2001
High performance 0.13 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric
- - P. Smeys
  - V. McGahay
  - et al.
- 2000
- VLSI Technology 2000
The use of simulation in semiconductor technology development
- - D.C. Cole
  - E.M. Buturla
  - et al.
- 1990
- Solid State Electronics