Tantalum plasma etching with minimum effect on underlying nickel-iron thin film
- R. Hsiao
- D.C. Miller
- et al.
- 1997
- Thin Solid Films
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14 results for Neil L. Robertson
Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Writing Performance of Narrow Gap Heads Made with Sputtered Laminated FeN Materials on 3800 Oe Coercivity Media
- C. Jahnes
- L. Vo
- et al.
- 1994
- IEEE Transactions on Magnetics
Electrolytic Codeposition of Ni-γAl2O3 Thin Films
- Patrick R. Webb
- Neil L. Robertson
- 1994
- JES