Publications

4 results for C.M. Greenlief

Hydrogen coverage during Si growth from SiH₄ and Si ₂H₆
- - S. Gates
  - S.K. Kulkarni
- 1992
- Applied Physics Letters
Kinetics of surface reactions in very low-pressure chemical vapor deposition of Si from SiH₄
- - S. Gates
  - S.K. Kulkarni
- 1991
- Applied Physics Letters
Mechanisms and models of Si film growth from SiH₄ and Si₂H₆
- - S. Gates
  - S.K. Kulkarni
  - et al.
- 1990
- Symposium on Process Physics and Modeling in Semiconductor Technology 1990
Kinetics and mechanics of Si₂H₆ surface decomposition on Si
- - C.M. Greenlief
  - H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Hydrogen coverage during Si growth from SiH4 and Si 2H6