Mechanisms and models of Si film growth from SiH4 and Si2H6
- S. Gates
- S.K. Kulkarni
- et al.
- 1990
- Symposium on Process Physics and Modeling in Semiconductor Technology 1990
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4 results for C.M. Greenlief
Hydrogen coverage during Si growth from SiH4 and Si 2H6
- S. Gates
- S.K. Kulkarni
- 1992
- Applied Physics Letters
Kinetics of surface reactions in very low-pressure chemical vapor deposition of Si from SiH4
- S. Gates
- S.K. Kulkarni
- 1991
- Applied Physics Letters
Kinetics and mechanics of Si2H6 surface decomposition on Si
- C.M. Greenlief
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films