KrF laser ablation of polyurethane
- Stephan Kueper
- James H. Brannon
- 1991
- SPIE Microelectronic Processing Integration 1991
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Ultraviolet photoablation of a plasma-synthesized fluorocarbon polymer
- James H. Brannon
- D. Scholl
- et al.
- 1991
- Applied Physics A Solids and Surfaces