The influence of silicon substrate crystallinity and doping on TiSi2 thin film morphology
- T.E. Karlin
- S. Nygren
- et al.
- 1993
- Applied Surface Science
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3 results for S. Nygren
Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process
- T.E. Karlin
- S.-L. Zhang
- et al.
- 1993
- Applied Surface Science
Morphological instabilities of nickel and cobalt silicides on silicon
- S. Nygren
- D. Caffin
- et al.
- 1991
- Applied Surface Science