Acid generation and acid diffusion in photoresist films
- D.R. McKean
- R.D. Allen
- et al.
- 1992
- Microlithography 1992
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6 results for Ulrich P. Schaedeli
Investigations on the structural morphology of sulfonium salt containing polymethacrylate films
- R.D. Allen
- U. Schaedeli
- et al.
- 1989
- ACS PMSE 1989
Polymeric matrix effects on the efficiency of acid generation from triphenylsulfonium salts
- D.R. McKean
- U. Schaedeli
- et al.
- 1989
- ACS PMSE 1989
Acid photogeneration from sulfonium salts in solid polymer matrices
- D.R. McKean
- U. Schaedeli
- et al.
- 1988
- ACS PMSE 1988
The effect of polymer structure on the efficiency of acid generation from triarylsulfonium salts
- Dennis R. McKean
- Ulrich P. Schaedeli
- et al.
- 2003
- Journal of Polymer Science Part A: Polymer Chemistry
Acid photogeneration from sulfonium salts in solid polymer matrices
- Dennis R. McKean
- Ulrich Schaedeli
- et al.
- 1989
- Journal of Polymer Science Part A: Polymer Chemistry