Phase formation and microstructure changes in tantalum thin films induced by bias sputtering
- Philippe Catania
- Ronnen A. Roy
- et al.
- 1993
- Journal of Applied Physics
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Highly reflective x-ray mirror
- Philip Catania
- James P. Doyle
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films