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Wolfgang Jacob- P.B. Comita
- W. Jacob
- et al.
- 1992
- SPIE Microelectronic Processing Integration 1992
- Paul B. Comita
- Eric Kay
- et al.
- 1994
- Applied Surface Science
- William R. Creasy
- Jeffrey A. Zimmerman
- et al.
- 1992
- Journal of Applied Physics