32nm general purpose bulk CMOS technology for high performance applications at low voltageF. ArnaudJ. Liuet al.2008IEDM 2008
Dual stress liner for high performance sub-45nm gate length SOI CMOS manufacturingH.S. YangR. Maliket al.2004IEDM 2004
Performance elements for 28nm gate length bulk devices with gate first high-k metal gateJun YuanC. Gruensfelderet al.2010ICSICT 2010
Reduction of RTA-driven intra-die variation via model-based layout optimizationJ.C. ScottO. Gluschenkovet al.2009VLSI Technology 2009
A 45nm low power bulk technology featuring carbon co-implantation and laser anneal on 45°-rotated substrateJ. YuanV. Chanet al.2008ICSICT 2008
Interaction of middle-of-line (MOL) temperature and mechanical stress on 90nm hi-speed device performance and reliabilityK.Y. LimV. Chanet al.2005ESSDERC 2005